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FFKM

FFKM (Perfluoroelastomer)

Ultra-high-performance elastomer for semiconductor process equipment and aggressive chemical sealing.

回答型サマリー

  • Temperature Range: Up to +320 C, compound-dependent
  • Media Profile: Aggressive process chemicals, plasma-adjacent exposure, and vacuum service
  • Engineering Role: Premium sealing material for low-outgassing, low-contamination process windows

適合条件

Best fit when downtime, contamination risk, or chemical attack makes standard FKM insufficient.

主な適用領域

Semiconductor chamber seals

Chemical process O-rings

Vacuum transfer interface seals

材料比較

項目 FFKMFKMEPDM
Chemical resistance MaximumHighLow to medium
Contamination control HighestStrongApplication-specific
Cost position PremiumHigherLower